Analysis of Electrostatic Driven Micromachined Gyroscope
نویسندگان
چکیده
منابع مشابه
Decoupling Control of Micromachined Spinning-Rotor Gyroscope with Electrostatic Suspension
A micromachined gyroscope in which a high-speed spinning rotor is suspended electrostatically in a vacuum cavity usually functions as a dual-axis angular rate sensor. An inherent coupling error between the two sensing axes exists owing to the angular motion of the spinning rotor being controlled by a torque-rebalance loop. In this paper, a decoupling compensation method is proposed and investig...
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ژورنال
عنوان ژورنال: IOP Conference Series: Materials Science and Engineering
سال: 2020
ISSN: 1757-899X
DOI: 10.1088/1757-899x/772/1/012044